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Pink plasma 
Ryann Monahan, ECE

Holonyak Lab Research Assistant Professor Yun-Sheng Chen and Assistant Professor Yang Zhao recently received a Google Faculty Research Award. The award will support their research aimed at improving disease prevention, through their team’s unique innovative photoacoustic imaging technique. Read more

Jon Dallesasse 
Allie Arp, CSL

Holonyak Lab Professor John Dallesasse was recently elected to the IEEE Electron Devices Society Board of Governors, and as Vice President of the society's technical committee. Read more

The structure of the quantum dot 
Susan McKenna, Bioengineering

Holonyak Lab's Andrew Smith developed a new form of quantum dots with short-wave infrared (SWIR) emission for imaging single molecules in cells and tissues. Read more

New faculty introductions
 Simeon Bogdanov

Simeon I. Bogdanov
Bogdanov is an Assistant Professor of Electrical Engineering. He received his PhD in 2014 Northwestern University, where he worked in the research group of Manijeh Razeghi. His achievements include the fabrication of InAs/GaSb superlattice photodetectors operating at 10 µm with the world's best sensitivity for this material system and the realization of the brightest room-temperature single-photon source based on a single nitrogen-vacancy color center in diamond.

Simeon's research is focused on quantum and integrated nanophotonics. His group will study and engineer light-matter interaction at the nanoscale and in the quantum regime, at the crossroads between the fields of Quantum Optics, Nonlinear Optics, Plasmonics, Optoelectronics and Nanomagnetism.

 Shaloo Rakheja

Shaloo Rakheja
Previously an assistant professor at New York University (NYU), Rakheja joined the ECE department as an assistant professor last fall. Prior to her time at NYU, Rakheja was a post-doc at the Massachusetts Institute of Technology. She received her masters and Ph.D. in electrical and computer engineering from the Georgia Institute of Technology. Rakheja’s research aims to connect the physics of nanoscale devices to their applications in energy-efficient computing.

New cleanroom engineer, Paul DiPippo
Welcome to Paul DiPippo, HMNTL’s new cleanroom engineer. His duties will include working with the CVD, PVD, and lithography systems. Paul joins HMNTL from Princeton University’s MicroNano Fabrication Lab, where he primarily focused on PECVD and RIE systems. He holds a bachelor's degree in materials science and engineering from Case Western Reserve University.

Publication highlights
  • Xiuling Li, The University of Illinois Develops A 3D Microchip Inductor to Fully Utilize 3D Structure space
  • Ryan Hool, a resident graduate student in HMNTL in the group of ECE Associate Professor Minjoo Larry Lee published a new article in Applied Physics Letters on growth of GaP layers on Si. In it, Hool demonstrated the importance of controlling the kinetics of defect formation in GaP, resulting in the lowest dislocation density for a relaxed III-V material grown on Si. Relaxed GaP on Si is an excellent platform material for integration of III-V solar cells and lasers on Si, both of which are actively pursued in Lee’s group. Ryan Hool is supported by a NASA Space Technology Research Fellowship.
New grants

Kejie Fang, NSF. Began 1/1/20, $393,831, CAREER: Cavity-less Optomechanics With Macroscopic Resonances

Lynford Goddard, FIT. $463,977, “Smart Metrology for Miniature Lens and Lens Assembly”

Shaloo Rakheja, NSF. $206,710, "E2CDA: Type I: Antiferromagnetic Magneto-electric Memory and Logic."

Shaloo Rakheja, NSF. $299,420, "Toward Energy-Efficient Heterogeneous Computing Integrating Polymorphic Magnetic and CMOS Devices."

Shaloo Rakheja, Lawrence Livermore National Laboratory (DOE). $103, 235, "Modeling and Simulation of Wide Bandgap Photoconductive Switches for RF Applications."

Equipment update
Elionix 150keV electron beam lithography system 

New Elionix 150keV to be installed in 2020
HMNTL is thrilled to announce that we expect installation of an Elionix 150keV electron beam lithography (EBL) system this year. This will be the first EBL tool in N. America with this high acceleration. We are grateful for the funding from the IFG program. (Granger?) This will give our users an important advantage and improved ability to shrink minimum feature sizes, expose thicker resists, and create variable height resist profiles. Edmond Chow can supply discussion and details.

Updated machine in Holonyak Lab 

Cleanroom capabilities added
Thanks to the Grainger Small Equipment Grant Program, we have added two new capabilities in HMNTL cleanroom. Prof. Bayram and Prof. Zhu received funding ($65K) to upgrade our Veeco Savannah S100 Atomic Layer Deposition system from three precursor channels to six precursor channels. The system can handle up to 100mm (4 inch) wafer with four material ALD deposition: Al2O3, HfO, AND NOW also ZrO and SiO2. The deposition is fully automated with recipe driven software running on a Win10 computer. The new software also provides process log to record the deposition parameters such as temperature, pressure and flow, etc. Please contact Edmond Chow if you are interested in more details or training of the new ALD capability.

New Critical Point Dryer 

Critical Point Dryer purchased
Prof. Fang and Prof. Gong received funding ($26K) to purchase a new Leica EM automated Critical Point Dryer (CPD300) to replace the 20 years old Tousimis CPD system. The new system is fully automated with an integrated touch screen user interface with recipe-controlled parameters: CO2 filling speed, temperature and pressure. The system can handle up to 25x25mm samples to release 50nm membranes after wet etching. Please contact Edmond Chow or Yaguang Lian if you are interested in using the system.

Aixtron CCS MOCVD reactor 

Aixtron CCS MOCVD successfully converted
Aixtron CCS MOCVD reactor has been successfully converted to dual mode – conventional III-V and III-nitride. Initial results show excellent quality GaN and AlN epitaxial materials. For more information, please contact Dr. Jeongho Park for training or materials.

Processing tips

Our new lithography engineer has demonstrated lithography on small (5mm x 5mm) on both the EVG 2-sided aligner as well as the new direct-write Heidelberg lithography tool. If this is helpful to your research contact Karthick Jeganathan for discussion, demonstration or training.

Facility information
 Existing Combustion Decomposition Oxidation

The facilities team at the Holonyak Lab has done an extensive audit of all building infrastructure which supports the cleanrooms, biolab, and general purpose labs.  There are over 150 systems that are considered, since HMNTL is a laboratory, most of the infrastructure is maintained by the laboratory per a Division of Responsibility agreement with Facilities and Services.  Some key systems that are well past end of life have been requested, including the controlled oxidation combustion systems (see photo, right), deionized water production system (see photo, below-right), and toxic gas detection system.

 Existing deionized water system

As part of the infrastructure for growth program funded in 2019, Humidification controls will be installed in the cleanrooms.  Different approaches for humidification controls are being considered and should be installed through university procurement and installation processes, with a target to install prior to December, 2020.


Have you recently gotten published? Won an award? Just have something cool to share? Let us know by emailing aarp@illinois.edu.